1.9K views · 46 reactions | Using SEMulator3D® virtual DOEs (Design of Experiments), we built a virtual FinFET model study to determine whether adding a source/drain contact recess (CT) process reduces parasitic capacitance without substantially impacting resistance. Here’s what we learned. https://bit.ly/4cA2PA0 | Lam Research Corporation | Facebook
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1.9K views · 46 reactions | Using SEMulator3D® virtual DOEs (Desi…
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