Chapter 8 Ion Implantation - SlideServe
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Chapter 8 Ion Implantation - SlideServe
Chapter 8 Ion Implantation. ION IMPLANTATION SYSTEM. Ion implanter is a high-voltage accelerator of high-energy impurity ions Major components are: Ion source (gases such as AsH 3 , PH 3 , B 2 H 6 ) Mass Spectrometer (selects the ion of interest) HV Accelerator (voltage > 1 MeV)
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