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While Energy Dispersive Spectrometry (EDS) remains a fast and convenient tool for SEM users, it can fall short when it comes to resolving spectral overlaps, detecting trace elements, and accurately ...

EDS is prone to insufficient energy resolution to differentiate energy lines near each other. For example, Si K, W M, and Ta M lines have only 30 eV energy differences. When these elements occur in ...

energy range Elements with high energy X-ray lines. Therefore, the addition of a micro X-ray (micro-XRF) source and a wavelength dispersive spectrometer (WDS) will enhance the analytical capability of ...